Extreme ultraviolet (EUV) lithography is the most important technology to have emerged out of the semiconductor industry in recent years. This report presents a case study of its development from the 1980s to the present. Using bibliometric data, this report details the evolution of the research community responsible for its development and the many scientific breakthroughs made on EUVs over a decades-long path to commercialization. The paper concludes with lessons learned for policymakers interested in protecting and promoting the next generation of emerging technologies.